High Pressure Ionization Pirani Gauge

熱離子真空計

HPG400

Vacuum Gauge - High Pressure Ionization Pirani Gauge

■ HPG400 saves cost and tool space and reduces the complexity

of vacuum system installation and setup

■ The high pressure hot ion gauge delivers accurate, reliable pressure

measurements from 1 X 10 ^-5 ... 1 mbar for improved process control

■ User selectable hot ion emission activation between 5 X 10 ^-2 and

1 mbar

■ Pirani interlock protects the hot filament from premature burnout

■ Optional graphic display and Fieldbus interfaces available

■ Automatic high vacuum Pirani adjustment reduces operator

interventions