|
Vacuum Valve – Rectangular Valve / Slit Valve / Angle Valve
|
28200 / 88200 Series Half Profile Rectangular Valve
The 28200 / 88200 Series Valve /Interface incorporates a Direct Drive Gate. The Valves have been tested for 1,000,000+ cycles with no failures. The HVA valves are designed to isolate vacuum pressure on either side of the gate. They can be used singly or in pairs to provide appropriate pass through or seal for any part of the system. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.
|
|
|
Stainless Steel Valves
( 28200 Series )
|
mm
|
32×222
|
32×332
|
46×236
|
50×336
|
|
|
inch
|
1×9
|
1×13
|
2×9
|
2×13
|
|
|
Aluminum Valves
( 88200 Series )
|
mm
|
32×222
|
32×332
|
46×236
|
50×336
|
100×1250
|
|
inch
|
1×9
|
1×13
|
2×9
|
2×13
|
4×50
|
|
|
50000 Series Rectangular Slit Valve
The 50000 Series Slit Valves feature an innovative actuator mechanism that eliminates any moving contact with the valve body. The only body contact is when the gate O-ring is sealed. This construction minimizes particulate generation and vibration. In addition, the valve may be installed in any orientation.
|
mm
|
46×236
|
50×336
|
|
inch
|
2×9
|
2×13
|
|
|
|
60000 Series Rapid Service Valve
The Rapid Service Valve is designed to greatly reduce process downtime during routine maintenance and service of the gate O-ring. This valve design is especially engineered to meet the mechanical interface and vacuum containment requirements of the industry.
|
|
|
14000 Series Angle Valves
The HVA Stainless Steel 14000 Series Angle Valves have been designed to offer maximum conductance with minimum size. These valves are ideally suited for systems where reliability and vacuum integrity are a major concern.
|
mm
|
12
|
16
|
19
|
25
|
40
|
50
|
63
|
75
|
100
|
150
|
200
|
250
|
273
|
300
|
|
inch
|
0.500
|
0.625
|
0.750
|
1.0
|
1.5
|
2.0
|
2.5
|
3.0
|
4.0
|
6.0
|
8.0
|
10.0
|
10.75
|
12.0
|
|
|
|
真空閥門
