| Cryo Pump |
|
Helium Compressor |
ULVAC
U6,U12,U16 |
CTI
T8,T10 |
|
ULVAC
C30,C30V,C30MV |
CTI
8500,8510,9600 |
| Dry Scroll Pump |
|
Turbo Pump |
Varian
SH100,PTS03001UNIV |
Iwata
ISP-250,ISP-500B |
|
Varian
Turbo-V 301,V300HT |
Pfeiffer
TMH262,TPH050 |
| Rotary Vane Pump |
|
Vacuum Pump |
|
Leybold
D40B
|
Edwards
RV12,E2M1.5
|
|
Alcatel
Drytel131,1025,M2012A
|
Pfeiffer
DUO5,PKD61017A
|
| Vacuum Valve |
|
Gate Valve |
|
Inficon,MDC
Angle Valve
|
Inficon
Butterfly Valve
|
|
HVA,VAT,MDC,SMC
Isolation / Throttle Valve
|
HVA,VAT,MDC
Gate Valve
|
|
Maintenance
