Model Number

Specifications

Power/Output

Features

APR 250/260/262

Compact Piezo Gauges.

*Range: 1X10^-1~1100 mbar,2x10^-1~2200 mbar (262).

*Temp.:

80℃(Bakeout)

10~60℃(Operating)

-40~70℃(Storage)

*Sensor cable length: 50m

*Supply: 13~30 VDC, 0.2 W.

*Output Signal:

1~9.8 V (Pressure range)

0.4 V(Sensor error below)

10 k0hm (Minimum load)

*Flange: DN 16 ISO-KF,DN 16 CF-F, G 1/4”.

*Absolute pressure measurement, independent of gas type.

*High accuracy from 1 mbar to 50 bar.

*Corrosion resistant.

Model Number

Specifications

Power/Output

Features

APR 265/266/267

Compact Piezo Gauges.

*Range:

1~5500 mbar(265)

1~11000 mbar(266)

5~55000 mbar(267)

*Temp.:

80℃(Bakeout)

10~60℃(Operating)

-40~70℃(Storage)

*Supply: 13~30 VDC, 0.2 W

*Output Signal:

1~9.8 V (Pressure range)

0.4 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 50m

*Fitting: G 1/4”

*Absolute pressure measurement, independent of gas type.

*High accuracy from 1 mbar to 50 bar.

*Corrosion resistant.

Model Number

Specifications

Power/Output

Features

CMR261/262

CMR263/264

Compact Capacitance Diaphragm Gauges

*Temperature compensated.

*Range:

1x10^-1~1100 mbar(261)

1x10^-2~110 mbar(262)

1x10^-3~11 mbar(263)

1x10^-4~1.1 mbar(264)

*Temp.:

65℃(Bakeout)

5~50℃(Operating)

-40~65℃(Storage)

*Supply: 18~30 VDC. 1.8W

*Output Signal:

1~9.8 V (Pressure range)

0.4 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 120m

*Flange: Tube AD 1/2”, DN16 ISO-KF, DN 16 CF-R, 8VCR.

*Absolute pressure measurement, independent of gas type.

*Excellent long-term and temperature stability.

*Minimal zero drift.

*Corrosion-resistant alumina construction.

Model Number

Specifications

Power/Output

Features

CMR271/272/273

Compact Capacitance Diaphragm Gauges

*Temperature controlled: 45℃.

*Range:

1x10^-1~1100 mbar(271)

1x10^-2~110 mbar(272)

1x10^-3~11 mbar(273)

*Temp.:

65℃(Bakeout)

15~40℃(Operating)

-40~65℃(Storage)

*Supply: 18~30 VDC. 7.5W

*Output Signal:

1~9.8 V (Pressure range)

0.4 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 65m

*Flange: Tube AD 1/2”, DN16 ISO-KF, DN 16 CF-R, 8VCR.

*Absolute pressure measurement, independent of gas type.

*Excellent long-term and temperature stability.

*Minimal zero drift.

*Corrosion-resistant alumina construction.

Model Number

Specifications

Power/Output

Features

CMR274/275

Compact Capacitance Diaphragm Gauges

*Temperature controlled: 45℃.

*Range:

1x10^-4~1.1mbar(274)

1x10^-5~0.11mbar(275)

*Temp.:

65℃(Bakeout)

15~40℃(Operating)

-40~65℃(Storage)

*Supply: 18~30 VDC. 7.5W

*Output Signal:

1~9.8 V (Pressure range)

0.4 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 65m

*Flange: Tube AD 1/2”,
  DN16  ISO-KF, DN 16 CF-R,
  8VCR.

*Absolute pressure measurement, independent of gas type.

*Excellent long-term and temperature stability.

*Minimal zero drift.

*Corrosion-resistant alumina construction.

Model Number

Specifications

Power/Output

Features

TPR265/280

Compact Pirani Gauge

*Temperature controlled: 45℃.

*Range:

5x10^-4~1000mbar

*Temp.:

80℃(Bakeout)

5~60℃(Operating)

-20~65℃(Storage)

*Filament: Tungsten

*Supply: 14~30 VDC. 1.5W

*Output Signal:

2.2~8.5 V (Pressure range)

0.5 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 200m

*Flange: DN16 ISO-KF,

DN 16 CF-R.

*Fitting: 1/8” NPT.

*Compact and robust.

*Optimum temperature compensation.

*Stable and fasr measuring.

Model Number

Specifications

Power/Output

Features

IKR 251/261

Compact Cold Cathode Gauge

*Range:

2x10^-9~1x10^-2mbar

*Temp.:

150/250℃(Bakeout)

5~55℃(Operating)

-40~65℃(Storage)

*Seal: FPM or metal

*Supply: 15~30 VDC. 2 W

*Output Signal:

1.8~8.5 V (Pressure range)

0.5 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 500m

*Flange: DN 25 ISO-KF, DN40 ISO-KF, DN40 CF-F.

*No filament burn-out – cold ionization.

*Withstands air Inrush.

*Corrosion resistant.

*Operating status display.

*Inverted magnetron.

Model Number

Specifications

Power/Output

Features

IKR 270

Compact Cold Cathode Gauge

*Range:

5x10^-11~1x10^-2mbar

*Temp.:

250℃(Bakeout)

5~55℃(Operating)

-40~65℃(Storage)

*Seal: metal

* Supply: 15~30 VDC. 2 W

*Output Signal:

1.8~8.5 V (Pressure range)

0.5 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 500m

*Flange: DN40 CF-F.

*No filament burn-out – cold ionization.

*Withstands air Inrush.

*Corrosion resistant.

*Operating status display.

*Inverted magnetron.

Model Number

Specifications

Materials

Features

IMR 265

Compact Capacitance Diaphragm Gauge

*Range:

5x10^-6~1000 mbar

*Temp.:

150℃(Bakeout)

0~55℃(Operating)

-20~70℃(Storage)

*Flange: DN16/25/40 ISO-KF, DN40 CF-F.

*Pirani measurement element: Copper,tungsten

* Supply: 20~30 VDC. 16 W

*Output Signal:

1.5~7.5 V

(Ioni Pressure range )

8.5~9.75 V

(Pirani Pressure range )

0.5 V(Sensor error)

10 k0hm (Minimum load)

*Sensor cable length: 100m

*Ideal for plasma and sputter processes.

*High accuracy, excellent reproducibility.

*Integrated Pirani switches the hot cathode automatically filament protection.

Model Number

Specifications

Power/Output

Features

PBR 260

Compact FullRange BA Gauge

*Range:

5x10^-10~1000 mbar

*Temp.:

150℃(Bakeout)

0~50℃(Operating)

-20~70℃(Storage)

*Filament: Tungsten

* Supply: 20~28 VDC. 16 W

*Output Signal:

0.774~10 V

(Pressure range )

0.5 V(Sensor error below)

10 k0hm (Minimum load)

*Sensor cable length: 100m

*Flange: DN 25/40 ISO-KF,

DN40 CF-R.

*Hot cathode(BA) with Pirani in one compact housing.

*Bayar Alpert gauges swithched on/off automatically by Pirani gauge.

*One port from atmosphere to UHV.

Model Number

Specifications

Power/Output

Features

PKR 251/261

Compact Full Range Gauge

*Range:

5x10^-9~1000mbar

*Temp.:

150℃(Bakeout)

5~55℃(Operating)

-40~65℃(Storage)

*Seal: FPM or metal

*Filament: Tungsten.

* Supply: 15~30 VDC. 2 W

*Output Signal:

1.8~8.6 V (Pressure range)

0.5 V(Sensor error below)

9.5V(Sensor error above)

10 k0hm (Minimum load)

*Sensor cable length: 300m

*Flange: DN40 CF-F.

*Two gauges in one housing-cold cathode(Inverted magnetron) and Pirani.

*Corrosion resistant.

*One port from atmosphere to UHV.

Model Number

Specifications

Power/Output

Features

Maxi Gauge

TPG 256 A

Display and Control units for compact gauges.

*Could connections for 6 gauges (max. 3 IMR265/PBR260)

*Range: 5x10^-11~55000 mbar.

*Temp.:

5~40℃(Operating)

-20~60℃(Storage)

*Protection: IP30.

*Supply: 50/60 Hz, 90~250 VAC.

*Output: 0~10 VDC.

*Setpoint: 60 VDC, 3A, 6 pieces.

*Error signal: 60 VDC, 1.5A, 1 piece.

*Interface: RS232C, RS422.

*Easy to operate.

*Calibration factors for all gases.

*Non-volatile parameter memory.

*Switching functions with relay output.

Model Number

Specifications

Power/Output

Features

Single Gauge

TPG 261

Display and Control units for compact gauges.

* connection for 1 compact gauge.

*Range: 5x10^-11~55000 mbar.

*Temp.:

5~50℃(Operating)

-20~60℃(Storage)

*Protection: IP30.

*Supply: 50/60 Hz, 90~250 VAC.

*Output: 0~10 VDC.

*Setpoint: 60 VAC, 1A, 2 pieces.

*Error signal: 60 V, 1 piece.

*Interface: RS232C

*Easy to operate.

*Calibration factors for all gases.

*Non-volatile parameter memory.

*Auto diagnostics.

Model Number

Specifications

Power/Output

Features

Single Gauge

TPG 262

Display and Control units for compact gauges.

* connection for 2 compact gauges.

*Range: 5x10^-11~55000 mbar.

*Temp.:

5~50℃(Operating)

-20~60℃(Storage)

*Protection: IP30.

*Supply: 50/60 Hz, 90~250 VAC.

*Output: 0~10 VDC.

*Setpoint: 60 VAC, 1A, 4 pieces.

*Error signal: 1 piece.

*Interface: RS232C

*Easy to operate.

*Calibration factors for all gases.

*Non-volatile parameter memory.

*Auto diagnostics.