Vacuum Valve – Gate Valve / Laminar Flow Valve / 3-Position Gate Valve
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11000 Series Standard Cycle Gate Valve
The 11000 Series Gate Valves feature a positive lock-over center mechanism or soft closure with pneumatic lock (optional). Valves maintain a closed status in the event of an air pressure loss. These valves provide valving for cryopumps, turbomolecular pumps, ion pumps and other applications requiring clean, low outgassing valves.
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mm
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16
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40
|
50
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63
|
75
|
100
|
150
|
200
|
250
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273
|
300
|
350
|
400
|
500
|
600
|
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inch
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0.625
|
1.5
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2.0
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2.5
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3.0
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4.0
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6.0
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8.0
|
10.0
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10.75
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12.0
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14.0
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16.0
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20.0
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24.0
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|
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13000 Series Laminar Flow Valve
The Laminar Flow 13000 Series Gate Valves feature a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. Two discrete carriage positions provide either 100% conductance (fully open) or 0% conductance (fully closed). In the open position, a flow orifice isolates all internal parts from the flow path. This orifice provides a clean, unbroken flow path through the valve while eliminating contact of the process gas with any of the valve mechanisms. Laminar Flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves.
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mm
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40
|
50
|
63
|
75
|
100
|
150
|
200
|
250
|
273
|
300
|
|
inch
|
1.5
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2.0
|
2.5
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3.0
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4.0
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6.0
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8.0
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10.0
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10.75
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12.0
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|
|
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21200 Series Million Cycle Gate Valve
31200 Series Million Cycle Long Life Gate Valve
The 21200 / 31200 Series Gate Valves feature a positive shut off; the valve will maintain its closed status in the event of a power loss followed by a pressure drop. These valves can be used with cryopumps, turbomolecular pumps, ion pumps, or in any application requiring clean, high cycle, low maintenance and low outgassing valves with positive shut-off characteristics.
|
mm
|
16
|
40
|
50
|
63
|
75
|
100
|
150
|
200
|
250
|
273
|
300
|
350
|
400
|
500
|
600
|
|
inch
|
0.625
|
1.5
|
2.0
|
2.5
|
3.0
|
4.0
|
6.0
|
8.0
|
10.0
|
10.75
|
12.0
|
14.0
|
16.0
|
20.0
|
24.0
|
|
|
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21700 Series 3 Position Gate Valve
The 21700 Series Pneumatic 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. Valve positions are fully open, fully closed and any set third position. These valves may also be utilized to smooth the transition from rough to high vacuum.
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mm
|
100
|
150
|
200
|
250
|
300
|
|
inch
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4.0
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6.0
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8.0
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10.0
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12.0
|
|
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Vacuum Valve – Throttle Valve / Isolation Valve / Pendulum Gate Valve
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16000 Series Shielded Gate Valve
The 16000 Series Shielded Gate Valves feature a traveling shield that moves with the gate to protect it from debris. These valves are used in extremely aggressive applications in which recurring down time is not an option. The shield, used with or without the purge port, greatly reduces particulate migration and prolongs the sealing integrity of the gate O-ring.
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mm
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40
|
75
|
100
|
150
|
200
|
250
|
300
|
350
|
|
inch
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1.5
|
3.0
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4.0
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6.0
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8.0
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10.0
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12.0
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14.0
|
|
|
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21800 Series Closed Loop Throttle Valve
The 21800 Series Closed-Loop Pneumatic Throttle Gate Valves utilize a standard HVA 21200 Series valve design with the addition of a patented throttle actuating mechanism. The throttle actuating mechanism consists of an MKS 146C Vacuum Gauge Measurement and Control System, an OMRON Analog Fiber-Optic Sensor and Amplifier, a PNEUTRONICS Pressure Control Unit and an over-sized HVA patented differential pressure actuator assembly. Shock and vibration are reduced to a minimum by our unique air cylinder design.
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mm
|
100
|
150
|
200
|
250
|
300
|
|
inch
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4.0
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6.0
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8.0
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10.0
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12.0
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|
|
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47200 Series Throttle / Isolation Valve
The 47200 Series Throttle / Isolation Gate Valve is a unique concept incorporating throttling and isolation in the same valve. Constructed of 304 stainless steel with vacuum compatible aluminum vanes, the valve has two welded bellows to seal both actuators for gate isolation and throttling vanes. With a low profile actuator, this valve lends itself to installation in limited space locations.
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mm
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100
|
150
|
200
|
250
|
300
|
350
|
|
inch
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4.0
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6.0
|
8.0
|
10.0
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12.0
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14.0
|
|
|
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30000 Series Pendulum Gate Valve
30000 Series Bi-metal Pendulum Valves were developed for applications that require mating metal sealing flanges and for certain corrosive environments. The stainless steel body portion allows the installation of most standard flanges in the vacuum industry. The valves may be used as a basic high vacuum isolation valve or a load-lock transfer port.
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Bi-metal Valves
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CF-F Flange、ISO Bolt Flange、ISO Clamp Flange、
ANSI Flange、JIS Flange、Straight Actuator
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Aluminum Valves
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ISO Bolt ＆ JIS Flange、Straight Actuator
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Vacuum Valve – Rectangular Valve / Slit Valve / Angle Valve
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28200 / 88200 Series Half Profile Rectangular Valve
The 28200 / 88200 Series Valve /Interface incorporates a Direct Drive Gate. The Valves have been tested for 1,000,000+ cycles with no failures. The HVA valves are designed to isolate vacuum pressure on either side of the gate. They can be used singly or in pairs to provide appropriate pass through or seal for any part of the system. A narrow profile design, including both actuator and controller, allows tight mounting between central, load-lock, handling and process chambers.
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Stainless Steel Valves
( 28200 Series )
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mm
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32×222
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32×332
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46×236
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50×336
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|
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inch
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1×9
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1×13
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2×9
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2×13
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Aluminum Valves
( 88200 Series )
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mm
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32×222
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32×332
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46×236
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50×336
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100×1250
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inch
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1×9
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1×13
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2×9
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2×13
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4×50
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50000 Series Rectangular Slit Valve
The 50000 Series Slit Valves feature an innovative actuator mechanism that eliminates any moving contact with the valve body. The only body contact is when the gate O-ring is sealed. This construction minimizes particulate generation and vibration. In addition, the valve may be installed in any orientation.
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mm
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46×236
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50×336
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inch
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2×9
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2×13
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|
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60000 Series Rapid Service Valve
The Rapid Service Valve is designed to greatly reduce process downtime during routine maintenance and service of the gate O-ring. This valve design is especially engineered to meet the mechanical interface and vacuum containment requirements of the industry.
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14000 Series Angle Valves
The HVA Stainless Steel 14000 Series Angle Valves have been designed to offer maximum conductance with minimum size. These valves are ideally suited for systems where reliability and vacuum integrity are a major concern.
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mm
|
12
|
16
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19
|
25
|
40
|
50
|
63
|
75
|
100
|
150
|
200
|
250
|
273
|
300
|
|
inch
|
0.500
|
0.625
|
0.750
|
1.0
|
1.5
|
2.0
|
2.5
|
3.0
|
4.0
|
6.0
|
8.0
|
10.0
|
10.75
|
12.0
|
|
|
|
|
|
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