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XT100, XT200, XT300 Residual Gas Analyzer

Includes built-in ion and pirani gauges

The XT residual gas analyzer (RGA) from Extorr offers exceptional performance and value.
These RGAs provide a more detailed vacuum gas analysis than is offered by any other single
competitive device. Each system comes complete with a multi-gauged quadrupole probe, a
control and communications unit (CCU), and a real-time Windows® software package.

◆ Residual Gas Analyzer with Integrated Pirani and Ion Gauge
◆ 100, 200 and 300 amu systems
◆ Faraday Detector with optional Electron Multiplier
◆ Real-time Windows® software capable of Multi-head operation
◆ Field Replaceable Dual Thoriated Iridium Filaments
◆ Better than 1 amu resolution
◆ 8 orders of magnitude dynamic range in a single scan
◆ Mass spectra, leak detection and pressure vs. time modes
◆ Built in Diagnostics, Easily upgradeable Software and Firmware
◆ Fully Insertable Probe
 
Operational
Technical Specification
Mass range
XT100, XT100M
1 to 100 amu
XT200, XT200M
1 to 200 amu
XT300, XT300M
1 to 300 amu
Mass filter type
Quadrupole
Resolution
Greater than 1 amu @ 10% peak height, adjustable
Operating pressure
Atmosphere to UHV ( ion gauge operation below 10-2 torr, RGA
operation below 10-3 torr and Multiplier operation below 10-6 torr)
Partial Pressure Detector type
Faraday cup
Partial Pressure Sensitivity (A/Torr)
5x10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu
full peak width, 10% height, 70 eV electron energy, 6 eV ion energy
and 2 mA electron emission current.
Minimum detectable partial pressure
5x10-14 torr with Multiplier. Measured with N2 @ 28 amu with 1 amu
full peak width, 10% height, 70 eV electron energy, 6 eV ion energy,
and 2 mA electron emission current. 10-11 torr with Faraday cup.
Total Pressure Detector type  >10-3 Torr
Pirani type, (measures heat loss from noble metal wire)
Total Pressure Detector type  <10-3 Torr
Bayard/Alpert type ion gauge, x-ray limit 10-9
CCU Max. operating temperature
70°C
CCU temperature sensor
solid state sensor in CCU, temperature continuously monitored
and displayed
Bakeout temperature
350°C (without CCU)
Probe operating temperature
100°C,  Platinum RTD on probe, temperature continuously
monitored and displayed
Ionizer Design
Open ion source , electron impact ionization.
Probe Materials
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel
Filament
Dual Thoriated Iridium with firmware protection.
Degas
Built-in 1 to 30 W ramp-up.
Electron energy
10 to 150 V, continuously programmable
Ion energy
3 to 10 V, continuously programmable
Electron emission current
0.1 to 5 mA, continuously programmable
Probe mounting
Minimum tube I.D. 1.375"  flange 2.75" CF
CCU dimensions
3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout
Mass stability
±0.1 amu after 30 minutes warmup.
Computer interface
RS-232C, 9600 - 115,200 Baud
Software
Windows®  2000, XP based application.
Power requirement
24 VDC @ 2.1 Amps. Standard 120 VAC adapter supplied.
Weight
5 lbs.
 
Closed Ion Source Gas Analyzers (CISGA) - CIS100, CIS200 and CIS300
■ 100, 200, and 300 amu systems
■ 1 ppm detection
■ 10 mTorr max. operating pressure
■ 1 x 10-12 Torr detection limit
■ Real-time RGA Windows software
■ Multi-head operation
■ Field-replaceable electron multiplier and filament
■ RGA and CIS mode

CIS Analyzer

CIS Rear Panel

Electron Multiplier

Gold Plated Ionizer
 
Operational
Technical Specification
MassRange
 
     CIS100
1 to 100 amu
     CIS200
1 to 200 amu
     CIS300
1 to 300 amu
Mass filter type
Quadrupole
Detector type
Faraday cup and electron multiplier
Resolution
(per AVS std. 2.3)
Better than 0.5 amu @ 10 % peak height. Adjustable to constant peak width
throughout mass range.
Max. operating temp.
70 °C
Bakeout temperature
300 °C (without ECU)
Ionizer
 
Design
Closed ion source, cylindrical symmetry, electron impact ionization
Material
Gold plated SS304
Filament
Tungsten or ThO2/Ir with firmware protection (field replaceable)
Electron energy 
25 to 105 eV, programmable
Ion energy
4 or 8 eV, programmable
Focus voltage
0 to 150 V, programmable
Electron emission current
0 to 1 mA, programmable
General
 
Probe mounting flange
2.75" CF
ECU dimensions
4.1" × 3.1" × 9.1" (WHL). Easily separated from the probe for bakeout.
LED indicators
Power ON/OFF, filament ON/OFF, electron multiplier ON/OFF, RS-232 Busy,
Error, Overpressure, Burnt Filament
Warm-up time
Peak height ±2 % after 3 minutes. Mass stability ±0.1 amu after 30 minutes.
Computer interface
RS-232C, 28,800 baud with high-level command set
Software
Windows based application
Power requirement
24 VDC @ 2.5 amps. Male DB9 connector, optional built-in power module for
AC line operation
Weight
6 lbs.

 
Residual Gas Analyzer (RGA) - RGA100, RGA200 and RGA300

 
■ 100, 200 and 300 amu systems
■ Better than 1 amu resolution
■ 6 orders of magnitude dynamic range in a single scan
■ 5 x 10-14 Torr detection limit
■ RGA Windows and LabVIEW software
■ Field-replaceable electron multiplier and filament
■ RS-232 interface
 
RGA Rear Panel
 
Dual ThO2/Ir Filament
 
Electron Multiplier
 
RGA Heater Jacket
 
Operational
Technical Specification
Mass range
 
     RGA100
1 to 100 amu
     RGA200
1 to 200 amu
     RGA300
1 to 300 amu
Mass filter type
Quadrupole
Detector type
Faraday cup (FC)—standard, electron multiplier (EM)—optional
Resolution
Better than 0.5 amu @ 10 % peak height (per AVS std. 2.3).
Adjustable to constant peak width throughout the mass range.
Sensitivity (A/Torr)
2 × 10-4 (FC), <200 (EM). User adjustable throughout high voltage range.
Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height,
70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current.
Minimum detectable
partial pressure
5 × 10-11 Torr (FC). 5 × 10-14 Torr (EM). Measured with N2 @ 28 amu with 1 amu
full peak width, 10 % height, 70 eV electron energy , 12 eV ion energy, and
1 mA electron emission current.
Operating pressure
10-4 Torr to UHV (FC), 10-6 Torr to UHV (EM)
Max. operating temp.
70 °C
Bakeout temperature
300 °C (without ECU)
Ionizer
　
Design
Open ion source, cylindrical symmetry, electron impact ionization.
Material
SS304 construction
Filament
Thoriated-iridium (dual) with firmware protection. Built-in 1 to 10 W degas ramp-up.
Field replaceable.
Electron energy
25 to 105 V, programmable
Ion energy
8 or 12 V, programmable
Focus voltage
0 to 150 V, programmable
Electron emission current
0 to 3.5 mA, programmable
General
　
Probe dimension
8.75" from flange face to top of ionizer
Probe insertion
2.0"
Probe mounting flange
2.75" CF
Minimum tube I.D.
1.375"
ECU dimensions
9.1" ×4.1" × 3.1" (WHL) Easily separated from the probe for bakeout.
LED indicators
Power ON/OFF, filament ON/OFF, degas ON/OFF, electron multiplier ON/OFF,
RS-232 Busy, Error, Overpressure, Burnt Filament.
Warm-up time
Mass stability ±0.1 amu after 30 minutes
Computer interface
RS-232C, 28,800 baud with high-level command set
Software
Windows based application
Power requirement
24 VDC @ 2.5 amps. Male DB9 connector. Optional 110/120/220/240 VAC adapter.
Weight
6 lbs.