| 超低溫冷凍幫浦 Cryo Pump |
|
氦氣壓縮機 Helium Compressor |
ULVAC
U6,U12,U16 |
CTI
T8,T10 |
|
ULVAC
C30,C30V,C30MV |
CTI
8500,8510,9600 |
| 乾式真空幫浦 Dry Scroll Pump |
|
渦輪分子真空幫浦 Turbo Pump |
Varian
SH100,PTS03001UNIV |
Iwata
ISP-250,ISP-500B |
|
Varian
Turbo-V 301,V300HT |
Pfeiffer
TMH262,TPH050 |
| 機械真空幫浦 Rotary Vane Pump |
|
油式真空幫浦 Vacuum Pump |
|
Leybold
D40B
|
Edwards
RV12,E2M1.5
|
|
Alcatel
Drytel131,1025,M2012A
|
Pfeiffer
DUO5,PKD61017A
|
| 真空閥門 Vacuum Valve |
|
真空閘閥 Gate Valve |
|
Inficon,MDC
Angle Valve
|
Inficon
Butterfly Valve
|
|
HVA,VAT,MDC,SMC
Isolation / Throttle Valve
|
HVA,VAT,MDC
Gate Valve
|
|
維修保養
