渦輪真空幫浦-Turbo Pump (Turbomolecular Pump)

渦輪真空幫浦

Vacuum Pump - Turbo Pump


Turbo-V 81 M	Turbo-V 81 T	Turbo-V 301 Navigator	Turbo-V 551 Navigator	Turbo-V 701 Navigator	Turbo-V 1001 Navigator

Pump Model	Turbo-V 81 M	Turbo-V 81 T	Turbo-V 301 Navigator	Turbo-V 551 Navigator	Turbo-V 701 Navigator	Turbo-V 1001 Navigator
Pump Specification	DN 40	DN 63	DN 100	DN 160	DN 200	DN 250
Pumping Speed, l/s
Nitrogen	50	77	250	550	690	1050
Helium	56	65	220	600	620	900
Hydrogen	46	50	200	510	510	920
Compression Ratio
Nitrogen	5 x 10⁸	7 x 10⁸	7 x 10⁸	> 1 x 10⁹	1 x 10⁹	1 x 10⁹
Helium	8 x 10⁴	3 x 10³	1 x 10⁵	1 x 10⁷	1 x 10⁷	1 x 10⁷
Hydrogen	7 x 10³	3 x 10²	1 x 10⁴	1 x 10⁶	1 x 10⁶	1 x 10⁶
Base pressure, mbar
with recommended mechanical pump	5 x 10^-10	5 x 10^-9	< 5 x 10^-10	< 1 x 10^-10	< 1 x 10^-10	< 1 x 10^-10
with recommended dry pump	5 x 10^-9	5 x 10^-8	< 5 x 10^-9	< 1 x 10^-10	< 1 x 10^-10	< 1 x 10^-10
Startup Time, min	< 1	< 1	2.5	< 5	< 5	< 4
Rotational Speed, rpm	80,000	80,000	56,000	42,000	42,000	38,000
Recommended Forepump
Two-stage mechanical pump	DS 42 - DS 102	DS 42 - DS 102	DS 102	DS 302	DS 402	DS 402
Dry pump	SH-110	SH-110	SH-110	TS300	TS300	TS300
Inlet Flange, nominal diameter
Klamp Flange, mm	40	-	-	-	-	-
ConFlat^®, mm (inches OD)	35 (2.75)	63 (4.5)	100 (6)	160 (8)	200 (10)	-
ISO clamp style, mm	-	63	100	160	200	250
ISO-F bolted, mm	-	-	-	160-F bolted	200-F bolted	250-F bolted
Foreline Flange, nominal diameter
Klamp Flange	NW16	NW16	NW16	NW25	NW25	NW40
SEM Version Available on Request	-	-	•	•	•	•
Controllers
Rack Controller	•	•	•	•	•	•
Navigator on board Controller	•	•	•	•	•	•
Integrated lectronics	-	-	-	-	-	-
PCB Controller	•	•	•	-	-	-

Vacuum Pump - Turbo Pumping System

TPS-mobile	Features ■ Completely dry, high capacity pumping systems ■ Higher compression ratio and pumping speed ■ Roll around Cart or Bench solutions ■ Two voltages 110 / 230 V ■ Versatile and Reliable ■ Fast Start Up ■ Turbomolecular Pumps from 46 to 600 l/sec ■ T-Plus Navigator Software allows communication with your PC ■ Dry Scroll or Rotary Vane Primary Pumps ■ Gauges and Accessories available ■ Custom solutions available Benefits ■ Fast, clean, dry pump down from atmosphere to 10 E^–10 mbar ■ Pressure monitor ■ Portable and compact ■ No maintenance required ■ Low cost of ownership Applications ■ UHV System pump down ■ Ion pump roughing ■ Lamp and tube processing ■ Cryopump regeneration ■ High Vacuum Systems operation ■ High and Ultra High Vacuum systems bake out

TPS-bench

TPS-compact

Features ■ New Generation Turbomolecular Pump Turbo-V 81-M and TV301 Navigator ■ Compact, Light, Dry, Clean and Robust System ■ Voltage 110-220 V - CE/CSA certified ■ RS-232 or Analogical Communication ■ Large pressure data display on board ■ Pressure driven set point, Analog set point ■ IDP-3 Dry Scroll backing pump ■ This product can be offered with wheels		Benefits ■ Designed for demanding applications ■ Cost-effective pumping solution ■ Can be used world-wide ■ Easy to use: plug and play system ■ Complies with world-wide safety standards ■ Easy system pressure measurement ■ Easy Tip-seal replacement ■ Excellent base pressure up to 10^-9 mbar ■ Easy to be moved in small space
Applications

Electron Microscopy and Mass Spectrometry	Industrial Applications	Semiconductor Manufacturing	High Energy Physics Research & Labs