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質量流量計 MFM & MFC

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真空幫浦 Vacuum Pumps

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真空計 Vacuum Gauges

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Vacuum Pump - Turbo Pump             Turbo-V 81 M Turbo-V 81 T Turbo-V 301 Navigator Turbo-V 551 Navigator Turbo-V 701 Navigator Turbo-V 1001 Navigator Pump Model Turbo-V 81 M Turbo-V 81 T Turbo-V 301 Navigator Turbo-V 551 Navigator Turbo-V 701 Navigator Turbo-V 1001 Navigator Pump Specification DN 40 DN 63 DN 100 DN 160 DN 200 DN 250 Pumping Speed, l/s Nitrogen 50 77 250 550 690 1050 Helium 56 65 220 600 620 900 Hydrogen 46 50 200 510 510 920 Compression Ratio Nitrogen 5 x 108 7 x 108 7 x 108 > 1 x 109 1 x 109 1 x 109 Helium 8 x 104 3 x 103 1 x 105 1 x 107 1 x 107 1 x 107 Hydrogen 7 x 103 3 x 102 1 x 104 1 x 106 1 x 106 1 x 106 Base pressure, mbar with recommended mechanical pump 5 x 10-10 5 x 10-9 < 5 x 10-10 < 1 x 10-10 < 1 x 10-10 < 1 x 10-10 with recommended dry pump 5 x 10-9 5 x 10-8 < 5 x 10-9 < 1 x 10-10 < 1 x 10-10 < 1 x 10-10 Startup Time, min < 1 < 1 2.5 < 5 < 5 < 4 Rotational Speed, rpm 80,000 80,000 56,000 42,000 42,000 38,000 Recommended Forepump Two-stage mechanical pump DS 42 - DS 102 DS 42 - DS 102 DS 102 DS 302 DS 402 DS 402 Dry pump SH-110 SH-110 SH-110 TS300 TS300 TS300 Inlet Flange, nominal diameter Klamp Flange, mm 40 - - - - - ConFlat®, mm (inches OD) 35 (2.75) 63 (4.5) 100 (6) 160 (8) 200 (10) - ISO clamp style, mm - 63 100 160 200 250 ISO-F bolted, mm - - - 160-F bolted 200-F bolted 250-F bolted Foreline Flange, nominal diameter Klamp Flange NW16 NW16 NW16 NW25 NW25 NW40 SEM Version Available on Request - - • • • • Controllers Rack Controller • • • • • • Navigator on board Controller • • • • • • Integrated lectronics - - - - - - PCB Controller • • • - - -     Vacuum Pump - Turbo Pumping System   TPS-mobile Features ■ Completely dry, high capacity pumping systems ■ Higher compression ratio and pumping speed ■ Roll around Cart or Bench solutions ■ Two voltages 110 / 230 V ■ Versatile and Reliable ■ Fast Start Up ■ Turbomolecular Pumps from 46 to 600 l/sec ■ T-Plus Navigator Software allows communication with your PC ■ Dry Scroll or Rotary Vane Primary Pumps ■ Gauges and Accessories available ■ Custom solutions available   Benefits ■ Fast, clean, dry pump down from atmosphere to 10 E–10 mbar ■ Pressure monitor                  ■ Portable and compact ■ No maintenance required       ■ Low cost of ownership   Applications ■ UHV System pump down          ■ Ion pump roughing ■ Lamp and tube processing        ■ Cryopump regeneration ■ High Vacuum Systems operation ■ High and Ultra High Vacuum systems bake out   TPS-bench   TPS-compact                                        Features ■ New Generation Turbomolecular Pump Turbo-V 81-M and TV301 Navigator ■ Compact, Light, Dry, Clean and Robust System ■ Voltage 110-220 V - CE/CSA certified ■ RS-232 or Analogical Communication ■ Large pressure data display on board ■ Pressure driven set point, Analog set point ■ IDP-3 Dry Scroll backing pump ■ This product can be offered with wheels Benefits ■ Designed for demanding applications ■ Cost-effective pumping solution ■ Can be used world-wide ■ Easy to use: plug and play system ■ Complies with world-wide safety standards ■ Easy system pressure measurement ■ Easy Tip-seal replacement ■ Excellent base pressure up to 10-9 mbar ■ Easy to be moved in small space Applications       Electron Microscopy and Mass Spectrometry Industrial Applications Semiconductor Manufacturing High Energy Physics Research & Labs

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