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| Vacuum Pump - Cryo Pump - CP-8 / CP-8LP / CP-10 / CP-16 |
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CP- 8 Cryopump
Standard cryopump for clean, oil free high vacuum pumping for research and production applications offered
at highly competitive pricing. Standard cryopump applications: sputtering tools, ion implanters, R&D bell-jar
systems,surface analysis, accelerators, beam lines And general vacuum systems.
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CP- 8LP Cryopump
Standard cryopump configuration for semiconductor tools the CP-8LP is ideal for space constrained applications
requiring clean, oil free high vacuum pumping solutions.
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CP- 10 Cryopump
Generally considered the most efficient cryopump design the 10” ANSI / 14” OD Conflat achieving double the gas
and water volume of the CP-8 cryopump, providing clean, oil free high vacuum pumping solutions. Standard
applications: Semiconductor, Aerospace & vacuum coating as well as R&D.
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CP- 16 Cryopump
Standard cryopump in use on larger box-coating systems, space simulation chambers, electron beam coating
systems requiring clean, oil free high vacuum pumping solutions.
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CP- 8 |
CP- 8LP |
CP-10 |
CP-16 |
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Specification
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CP-8
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CP-8LP
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CP-10
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CP-16
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Gas Pumping speeds
( liters/second )
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Water
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4000
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4000
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9000
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16000
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Air
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1500
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1500
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3000
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5000
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Hydrogen
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2200
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2200
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5000
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5000
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Argon
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1200
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1200
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2500
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4200
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Gas capacities
( standard liters @ 5x10-6 Torr )
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Hydrogen
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12
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12
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24
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15
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Argon
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1000
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1000
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2000
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2500
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Throughput
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Argon
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700 sccm
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700 sccm
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1500 sccm
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500 sccm
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Crossover
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Torr-liters
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150
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150
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300
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300
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Cool down time
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60 Hertz
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90 min
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90 min
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60 min
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150 min
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Cryopump measurements
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Height
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7.03"
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7.03"
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23.9"
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24"
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Length
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22.6"
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22.6"
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-
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22.6"
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Weight
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42 lbs
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42 lbs
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85 lbs
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Inlet flange
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ANSI/ISO/CF
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ANSI/ISO/CF
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ANSI/ISO/CF
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ISO/CVC
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超低溫冷凍幫浦
