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Vacuum Pump - Diffusion Pump – AX-65 / HS-2 / VHS-4 / VHS-6
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Pump Model
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AX-65
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HS-2
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VHS-4
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VHS-6
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Previous Model Number
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-
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0160
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0183
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184
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Speed, l/s (operating range)
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Air
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65
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160
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750
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1,550
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Helium & Hydrogen
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90
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200
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940
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1,930
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Maximum forepressure, Torr (mbar)
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No load
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0.75 (1.00)
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0.55 (0.72)
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0.65 (.86)
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0.65 (0.85)
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Full load
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0.60 (0.78)
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0.40 (0.52)
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0.55 (.73)
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0.55 (0.72)
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Maximum throughput,
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T-l/s (mbar-l/s) In operating range
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0.19 (0.25)
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0.60 (0.80)
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1.5 (2.0)
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2.4 (3.2)
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@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
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0.30 (0.40)
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0.70 (0.93)
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2.5 (3.2)
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3.5 (4.5)
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Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
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0.15 (0.25)
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5.0 (8.5)
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10 (17)
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17.0 (28.9)
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Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
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2 x 10-4
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1 x 10-3
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5 x 10-4
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5 x 10-4
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Warmup time, minutes
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7
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15
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10
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10
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Cooldown time, minutes
With quick cool coil, where applicable
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-
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10
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10
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10
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Fluid charge
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30cc
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100 cc
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300 cc
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500 cc
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Electrical requirements
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1 ph
50/60 Hz
90/115/165/220 V
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1 ph
50/60 Hz
120/240 V
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1 ph
50/60 Hz
120/208/240 V
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1 ph
50/60 Hz
120/208/240 V
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Power, Watts
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200/250
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450
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1450
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2200
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Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
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N/A
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0.1 (20)
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0.15 (30)
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0.25 (50)
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Vacuum Pump - Diffusion Pump – VHS-250 / VHS-10 / VHS-400 / HS-16
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VHS-250
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VHS-10
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VHS-400
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HS-16
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Pump Model
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VHS-250
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VHS-10
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VHS-400
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HS-16
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Previous Model Number
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–
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0185
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–
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0164
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Speed, l/s (operating range)
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Air
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2,125
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3,650
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4,500
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6,000
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Helium & Hydrogen
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2,660
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4,560
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5,625
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7,500
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Maximum forepressure, Torr (mbar)
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No load
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0.65 (.85)
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0.65 (.85)
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0.65 (.85)
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0.65 (.85)
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Full load
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0.55 (0.72)
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0.55 (0.72)
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0.55 (0.72)
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0.55 (.72)
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Maximum throughput,
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at 8100 W
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T-l/s (mbar-l/s) In operating range
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2.6 (3.5)
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6.3 (8.4)
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6.3 (8.4)
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9.5 (11.7)
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@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
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3.5 (4.5)
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7.5 (10.0)
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7.5 (10.0)
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11.5 (15.3)
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Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
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17.0 (28.9)
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30 (51)
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30 (51)
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80 (136)
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Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
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5 x 10-4
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5 x 10-4
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1 x 10-3
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1.5 x 10-3
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Warmup time, minutes
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15
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15
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30
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45
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Cooldown time, minutes
With quick cool coil, where applicable
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10
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25
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25
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48
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Fluid charge
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1,000 cc
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1,000 cc
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3 U.S. qts.
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5 U.S. qts.
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Electrical requirements
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3 ph
50/60 Hz
120/208/240 V
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3 ph
50/60 Hz
208/240/380/480 V
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3 ph
50/60 Hz
208/240/380/480 V
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3 ph
50/60 Hz
240/415/480 V
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Power, Watts
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2200
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4400
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4400
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8100/9600
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Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
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0.25 (50)
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0.40 (80)
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0.40 (80)
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1.5 (300)
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| Vacuum Pump - Diffusion Pump – HS-20 / HS-32 / HS-35 |
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Pump Model
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HS-20
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HS-32
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NHS-35
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Previous Model Number
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0165
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0167
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0169
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Speed, l/s (operating range), Air
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10,000
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17,300
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28,000
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Helium & Hydrogen
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12,500
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21,625
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35,000
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Maximum forepressure, Torr (mbar)
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No load
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0.65 (.85)
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0.50 (.65)
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0.55 (.71)
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Full load
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0.55 (.72)
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0.35 (.45)
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0.40 (.52)
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Maximum throughput,
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T-l/s (mbar-l/s) In operating range
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12.5 (16.7)
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30 (40)
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25 (33)
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@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
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18 (23.4)
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35 (45.5)
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35 (45.5)
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Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
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100 (170)
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300 (510)
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300 (510)
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Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
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1.5 x 10-3
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7 x 10-4
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5 x 10-4
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Warmup time, minutes
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60
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60
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-
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Cooldown time, minutes
With quick cool coil, where applicable
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85
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180
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180
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Fluid charge
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3 U.S. gal.
(4.7 liters)
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3 U.S. gal.
(11.3 liters)
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3 U.S. gal.
(11.3 liters)
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Electrical requirements
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3 ph, 50/60 Hz
240/415/480 V
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3 ph, 50/60 Hz
240/415/480 V
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3 ph, 50/60 Hz
240/415/480 V
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Power, Watts
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12000
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24000
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24000
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Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
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1.5 (300)
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4.0 (800)
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4.0 (800)
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油擴散式真空幫浦
