Model
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Specifications
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Power/Output
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Feature
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FRG700
FRG702
(All Metal)
Pirani/MG Combination Gauge.
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*Range: 5x10-9 to 1000 mbar.
*Temp.:
Operation:5~55℃
Storage:-40~65℃
Bake-out:150℃
*Cable length: ≦50m(max)
*Flange:NW25KF, DN40 CF
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*Supply voltage:0~10.5V,
≦1 Vpp, ≦2 W.
*Output:1.82~8.6V
(Measurement)
0~10.5V(Voltage)
*Erro Signal:<0.5V(No
supply),>9.5V(Pirani
sensor, filament rupture.
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*No filament to burn out; easy to clean.
*No filament to burn out; easy to clean
*Can be operated by a V-81 or V-301 rackcontrollerand used with the TPS Compact and MiniTask.
*and used with the TPS Compact and MiniTask
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MPG400
MPG401
Inverted Magnetron Pirani Gauge.
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*Range: 5x10-9 to 1000 mbar.
*Temp.:
Operation:5~55℃
Storage:-40~65℃
Bake-out:150℃
Filament:120℃
*Flange:NW25/40KF, DN40 CF.
*FPM sealed for MPG400 and metal sealed for MPG401.
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*Supply voltage:15~30 VDC,
≦1 Vpp, ≦2 W.
*Output: 1.82~8.6V
(Measurement)
0~10.5V(Voltage)
*Erro Signal:<0.5V(No
supply),>9.5V(Pirani
sensor, filament rupture.
|
*No filament to burn out.
*Excellent ignition properties
*Easy to clean.
*FPM or metal-sealed
feedthrough.
*LED indicator for high voltage on.
*Logarithmic analog output signal.
|
PEG050
Penning Gauge
|
*Range: 1x10-9~10-2 mbar
*Temp.:
Operation:0~80℃
Storage:-25~80℃
*Flange: DN25 ISO-KF / DN40 ISO-KF.
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*Supply (anode potential):3.3/1.6 Kv.
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*Rugged.
*Insensitive to air inrushes and vibrations.
*Easy disassembly and cleaning of the measurement system.
*Exchangeable cathode plate.
*Titan cathodes plates grant longer lifetime.
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PEG100
Penning Gauge
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*Range: 1x10-9~1x10-2 mbar.
*Temp.:
Operation:10~50℃
Storage:-20~75℃
Bake-out:350℃ (Without
electronics),70℃(With
electronics, at flange.)
*Flange: DN25 ISO-KF,
DN40 CF-R.
*Cable Length:100 m max.
|
*Supply: 14.5~36 V DC , < 2 W.
*Output signal:0~10.6 (V),
measurement range:
0.66~10 V,
Relation voltage/pressure:
1.333 V/ Decade.
*Protection type: IP40
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*All metal cold cathode sensor(Penning) with ceramic feedthrough.
*Innovative electrode geometry provides excellent ignition properties.
*The anode ring and the titanium cathode can be cleaned or replaced easily.
*LED indicator for power on and plasma ignited.
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525
Cold-Cathode Gauge Tube
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*Range: 1× 10-8 to 1 × 10-2 mbar.
*Baking Temp.:100℃.
*Recommended controllers:
Multi-Gauge™, senTorr™
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*Cathode: Aluminum.
*Body: Stainless Steel.
*Insulator: Brazed
aluminum.
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*With excellent repeatability, accuracy, and reliability.
*Sudden exposures to atmospheric pressure will not cause any damage, because there is no filament to burn out.
*It’scan be started at very low pressures, where ordinary cold-cathode gauges are difficult to start.
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