 HPEG100 |
Vacuum Gauge - Penning Gauge
■ Wide measurement range from 5 X 10 -9 to 1 X 10 -2 mbar
(3.8 X 10 -9 to 7.5 X 10 -3 Torr)
■ All-metal cold cathode sensor (Penning) with ceramic feedthrough
■ New electrode geometry provides excellent ignition properties
■ Decreased high voltage after plasma ignition and titanium cathode
plates reduce risk of contamination, even during sputtering
operations with argon
■ The anode ring and the titanium cathode can be cleaned or replaced easily
■ Minimal magnetic field intensity adjacent to gauge
■ LED indicator for power on and plasma ignited
■ Logarithmic analog output signal
■ Fieldbus interface (Profibus DB, DeviceNet) for easy integration into
vacuum systems using network communications
|
|
||
|
|
||
