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儀器與耗材 Instruments


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RF Generator & Matching Network (AG Series)
    AG 0x13 Series   
100W to 2400W RF Generator
Model:
AG0113(120W, Air Cooled)
AG0313(300W, Air Cooled)
AG0613(600W, Air Cooled)
AG1013(1000W, Air Cooled)
AG1213W(1200W, Water Cooled)
AG2413(2400W, Water Cooled)
 
■ Frequency Of Operation: 13.56 MHz
■ Low Harmonic Distortion
■ Automatic and Manual Gain Control
■ Half rack mount or stand alone versions
■ High Speed Pulsing (Bursting) controls
■ Air cooled (Air & Water 1200 W +)
■ Analog/Digital, RS-232, USB interfaces
■ Complete generator & tuner control via front panel
■ GUI Software (Compelete PC control)
■ Includes all essential RF power/communication cables and mounting brackets
■ Ideal for Industrial, Scientific, and Medical Applications
 
 AIT-600 R Series
100W to 2400W RF Matching Network
Model:
AIT-600-03(300W)
AIT-600-06(600W)
AIT-600-10(1200W)
AIT-600-06R(600W)
AIT-600-12R(1200W)
AIT-600-24R(2400W)
 
■ Frequency Of Operation:13.56 MHz
■ Half rack mount or stand alone versions (R Series)
■ Air & Vacuum capacitors
■ Analog & Digitial Interface
■ Air cooled
■ Front panel display for network positions
■ Controller available for manually tuning network

 
DC Power Supply

 

DCM 1500 RF DC Generator.jpg
DC Power Supply
 
 
 
Model:
DCM-1500D
 
■ Available in 750 W, 1000 W, 1500 W
■ Voltage, Current, Power regulation modes
■ Communication Interfaces of RS-232 / RS-422
■ Compact design, full rack mount
■ 2U Rack Mounting.
■ Ideal for low power magnetron sputtering or bias supplies in RF sputtering and RF etching
 

 

RF Generator (RF-3-XIII and RF-6-XIII)
         
RF-3-XIII
■ 300 Watts @ 13.56Mhz
■ Lightweight design @ 19lbs.
■ Line input 110-240
■ 1/2 rack for space saving
■ User friendly controls
■ 7.5W x 5.5H x 15.5L
■ Output connector N type
■ 0-5.5 Vdc controls
 
RF-6-XIII
■ 600 Watts @ 13.56Mhz
■ Lightweight design @ 31lbs.
■ Line input 100-240 Vac
■ 1/2 rack for space saving
■ User friendly controls
■ 8.5W x 7.0H x 19.0L
■ Output connector N type
■ 0-5 Vdc controls
■ Hum, Ripple, Noise <45db
Matching Networks (Auto Tuner)



AIM 500 AutoTuner
■ Built-in Controller for Auto-Tuning
■ Built-in Presets for easy ignition to tune radio
■ Requires +/- 15 Vdc for it's power source
■ Field testable and set-up friendly controls
■ Compatible with all existing RF Power Supplies
■ Optional DC Probe outlet
■ All functions of our dependable controller now inside
■ 15L x 9W x 5H
■ Cost Effective
 
ATN-5 AutoTuner
■ Presets built in controller for easy Plasma Ignition.
■ Lightweight controller (2.5lbs).
■ Field testable and set-up friendly controls.
■ Compatible with all existing RF power supplies.
■ Accepts 110-240 Vac without tap changes.
■ OptionalDC probe output.
■ 500 watta @ 13.56MHhz.
■ Auto tuning at low cost.
■ We also have a manual version for further cost savings.
 
MN 500 (Manual Match)
■ 500 watts @ 15.36 Mhz
■ Low cost with wide impedance range
■ Works with any RF Generator model
■ Perfect for R&D Plasma applications
■ 8W x 12D x 5H
 
ATN-10 AutoTuner
■ Presets built in controller for easy Plasma Ignition.
■ Lightweight controller (3lbs).
■ Accepts 110-240 Vac without tap changes.
■ DC probe capabilities built-in.
■ Handles 1000 watts continuously.
■ Can be used with all types of RF Generators.
■ Field test and setup Friendly.
    
        ATN-20/30                     ATN-50/100
ATN-20/30/50/100 Auto Tuner
■ Lightweight Controller (2.5 lbs.)
■ Accepts 110-240 Vac without tap changes
■ Field testable and set-up friendly controls
■ Compatible with all existing RF Power Supplies
■ Optional DC Probe output
■ 2-3-5-10 Kw models in the same configuration
■ 13.56 and 27.12Mhz available
 



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