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Plasma DC Power Supply (ZENITH-10)







Specifications
1. OUTPUT RATING
1-1
Output Voltage
V
0~800
1-2
Output Current
A
0~25
1-3
Output Power
kW
0~10
2. INPUT CHARACTERISTICS
2-1
Input Voltage / Frequency
-
380VAC±10% / 50~60Hz / 3ØPhase
2-2
Input Current
A
1Ø 19
2-3
Efficiency
%
Approximately 90
3. OUTPUT CONTROL
-
Constant Power / Voltage / Current
4. Control Source Options
4-1
Local
-
LCD Display
4-2
Remote (1)
-
RS232 or RS-485
4-3
Remote (2)
-
Analog Interface
4-4
Remote (3)
-
CAN ( Option )
5. Arc Detection Criteria
5-1
Imax (Over current detection)
-
User adjustable
-
Imax threshold 10 --- 130%
-
Imax break-time 5 --- 100ms
-
Imax remp-time 5 --- 100ms
5-2
Arc Detection Time
-
Senses arcs within 100ns
5-3
Arc Energy
-
< 0.4J for hard arc
-
< 5mJ for micro arc
6. PROTECTIVE FUNCTIONS
6-1
Over Current Protection
-
Max Output Current +10%
6-2
Over Temperature Protection
-
90℃
7. ENVIRONMENTAL CONDITIONS
7-1
Operation Temperature
℃
0~40
7-2
Operation Humidity
%
30~60
8. MECHANICAL
8-1
Cooling
-
Forced air cooling by internal fans
8-2
Weight
kg
35
8-3
Dimensions ( W x H x D )
mm
430×133×600

 
Variable DC Power Supply

‧Last Voltage , Current Setting Save
‧Constant Voltage / Constant Current Mode
‧RS232 / 485 Interface
‧External DC Voltage Control
 
■ High Voltage Power Supply
NEOS H
30W Max
Input Voltage : DC 20~28V
Size(mm) : 42(H)×147(W)×127(D)
Voltage(kV)
1
5
10
15
Current(mA)
30
15
3
2
NEOS H
120W Max
Input Voltage : 110/220VAC±10%, 1Ø
Size(mm) : 70(H)×186(W)×247(D)
Voltage(kV)
1
5
10
30
Current(mA)
120
24
12
4
NEOS H
200W Max
Input Voltage : 110/220VAC±10%, 1Ø
Size(mm) : 80(H)×208(W)×264(D)
Voltage(kV)
1
5
10
30
40
Current(mA)
200
40
20
6
5
NEOS H
2000W Max
Input Voltage : 220VAC±10%, 1Ø
Size(mm) : 132(H)×430(W)×600(D)
Voltage(kV)
10
20
50
80
100
Current(mA)
200
100
40
25
20
NEOS H
12kW Max
5000W Max
Input Voltage : 220/380VAC±10%, 3Ø
Size(mm) : 528(H)×430(W)×600(D)
Voltage(kV)
3
50
60
Current(mA)
4000
100
80
■ Genreal Purpose Power Supply
 
NEOS
200W Max
400W Max
Input Voltage : 90~265VAC, 1Ø
Size(mm) : 125(H)×70(W)×350(D)
Voltage (V)
20
36
20
36
Current (A)
10
6
20
12
NEOS
750W Max
1500W Max
Input Voltage : 90~265VAC, 1Ø
Size(mm) : 44(H)×430(W)×600(D)
Voltage (V)
40
60
40
60
Current (A)
19
12.5
38
25
NEOS
2000W Max
Input Voltage : 220VAC±10%, 1Ø
Size(mm) : 88(H)×430(W)×485(D)
Voltage (V)
50
60
80
100
Current (A)
40
30
25
20
NEOS
3000W Max
Input Voltage : 220VAC±10%, 1Ø
Size(mm) : 88(H)×430(W)×485(D)
Voltage (V)
50
60
80
100
Current (A)
60
50
35
30
NEOS
5000W Max
Input Voltage : 220VAC±10%, 3Ø
Size(mm) : 132(H)×430(W)×600(D)
Voltage (V)
10
25
50
100
Current (A)
500
250
100
50

 
RF Power Supply - RF Generators
         
RF-3-XIII
■ 300 Watts @ 13.56Mhz
■ Lightweight design @ 19lbs.
■ Line input 110-240
■ 1/2 rack for space saving
■ User friendly controls
■ 7.5W x 5.5H x 15.5L
■ Output connector N type
■ 0-5.5 Vdc controls
 
 
RF-6-XIII
■ 600 Watts @ 13.56Mhz
■ Lightweight design @ 31lbs.
■ Line input 100-240 Vac
■ 1/2 rack for space saving
■ User friendly controls
■ 8.5W x 7.0H x 19.0L
■ Output connector N type
■ 0-5 Vdc controls
■ Hum, Ripple, Noise <45db
 
 
RF-10-XIII / RF-20-XIII
■ RF-10-XIII is our 1000 watt RF Generator @ 13.56 Mhz
■ RF-20-XIII is our 2000 watt RF Generator @ 13.56 Mhz
■ Lightweight chasis @ 50 lbs
■ Line input is 190-240 Vac
■ 19" Rack Mount, with H @ 8.00" and L @ 20.0"
■ User friendly controls
■ Solid RF Design for long term use
■ Models available with frequencies of 27.12 and 40.68 Mhz
■ Air Cooled
■ 0-5 Vdc remote control features
■ Blank front panel model available

 
RF Power Supply - Matching Networks
AIM 500 AutoTuner
■ Built-in Controller for Auto-Tuning
■ Built-in Presets for easy ignition to tune radio
■ Requires +/- 15 Vdc for it's power source
■ Field testable and set-up friendly controls
■ Compatible with all existing RF Power Supplies
■ Optional DC Probe outlet
■ All functions of our dependable controller now inside
■ 15L x 9W x 5H
■ Cost Effective
 
 
ATN-5 AutoTuner
■ Presets built in controller for easy Plasma Ignition.
■ Lightweight controller (2.5lbs).
■ Field testable and set-up friendly controls.
■ Compatible with all existing RF power supplies.
■ Accepts 110-240 Vac without tap changes.
■ OptionalDC probe output.
■ 500 watta @ 13.56MHhz.
■ Auto tuning at low cost.
■ We also have a manual version for further cost savings.
 
 
MN 500 (Manual Match)
■ 500 watts @ 15.36 Mhz
■ Low cost with wide impedance range
■ Works with any RF Generator model
■ Perfect for R&D Plasma applications
■ 8W x 12D x 5H
 
 
ATN-10 AutoTuner
■ Presets built in controller for easy Plasma Ignition.
■ Lightweight controller (3lbs).
■ Accepts 110-240 Vac without tap changes.
■ DC probe capabilities built-in.
■ Handles 1000 watts continuously.
■ Can be used with all types of RF Generators.
■ Field test and setup Friendly.
 
    
        ATN-20/30                     ATN-50/100
ATN-20/30/50/100 Auto Tuner
■ Lightweight Controller (2.5 lbs.)
■ Accepts 110-240 Vac without tap changes
■ Field testable and set-up friendly controls
■ Compatible with all existing RF Power Supplies
■ Optional DC Probe output
■ 2-3-5-10 Kw models in the same configuration
■ 13.56 and 27.12Mhz available

 
 
ATN-ICP
■ Internal presets for easy Plasma Ignition
■ Easy to reach adjustment area's for precise set-ups
■ Both air and water-cooled to ensure maximum performance
■ 110-240 Vac variable line input without tap charges
■ Front Panel test capabilities for easy field test and set-up
■ Can be used with all RF Generators currently available






 
RF Power Supply - Accessories

 
CX-2-4-6
■ Frequency stability .05%.
■ Output frequency 13.56 Mhz.
■ 19" rack mount.
■ 120-240vac line input (no taps).
■ Available 2, 4, or 6 outputs.
■ Phase shifters standard.
■ Degree shift switch w/ shutoff mode.
 
 
CX-11/16/21 Common Excitor with Phase Shifters
■ Frequency stability .05%
■ Output frequency 13.56 Mhz
■ 19" Rack mount
■ 110-240vac line inputs (no taps)
■ Available 11, 16, 21 outputs
■ Phase shifters on all slave outputs
■ 180/360 degree shift switch
■ Shutoff mode for unused outputs
 
 
PLASMA TORCH BOX
■ Digital flow control of Nebulization Process.
■ Plasma Auto Tuning from ignition to load.
■ Front Panel RF Power Control.
■ Three useable Plasma View Positions.
■ Includes water circulator for load coil cooling.
 
 
RF Blocker
■ Filters RF from DC Component
■ Lightweight design @ 2 lbs.
■ Hooks up at DC Source
■ Outputs directly to RF Source
■ 300-2Kw for 1-13.56 Mhz
■ 3.5"W x 3.0"H x 6.5"L
■ N or HN Connectors Available
■ 0-5 Vdc controls
 
 
CHILLERS

MODEL FK-1 PERFORMANCE
Heat Removal
700 BTU/HR
2100 BTU/HR
3500 BTU/HR
Performance
with Flow = 1 gpm
Tout = Tair + 15°F
Tout = Tair + 45°F
Tout = Tair + 75°F
Performance
with Flow = 2 gpm
Tout = Tair + 17°F
Tout = Tair + 50°F
Tout = Tair + 85°F
 
 
DC Power Supply - EnerStream, EnerPulse, PulseGen, and DualPulse series

 
 
 
EnerStream, EnerPulse, PulseGen, and DualPulse series are power supplies designed to fit to load optimized for sputter
applications. It divides into two switches, either a DC switch or a pulse switch. In addition, according to the cathode
application, it divides into a Single Magnetron and a Dual Magnetron sputters. For bigger DC switches, one can supply up to
DC 160kW as a result of parallel operation on EnerStream models.
 
DC Magnetron Sputter：EnerStream series
-Application : Al, Cu, Ti, Cr, Ni, Si, ITO
-Economic model. Applied to low resistive materials such as metal deposition process
 
Pulsed DC Magnetron Sputter：EnerPulse & PulseGen series
-Application : Al, Cu, Ti, Cr, Ni, Si, ITO, Graphite, TiN, ZnO, SiO2, Al2O3
-High resistive materials can be used such as silicon deposition process
-High quality of thin film is enabled
 
Dual Magnetron Sputter：DualPulse series
-Coating Application : Al, Cu, Ti, Cr, Ni, Si, ITO, Graphite, TiN, ZnO
-High resistive materials can be used such as silicon deposition process
-Two different targets can be sputtered with one plasma power supply
-We enable the precise control of critical variables to vary the composition and other characteristics of thin film
 
Model
Power
Specifications
Type
EnerStream 1
1 kW
800V / 2.5A
DC
EnerStream 3
3 kW
800V / 7,5 A
DC
EnerStream 5
5 kW
800V / 12.5 A , < 0.5mJ/1kW
DC
EnerStream 10
10 kW
800V / 25 A , < 0.5mJ/1kW
DC
EnerStream 15
15 kW
800V / 37.5 A , < 0.5mJ/1kW
DC
EnerStream 20
20 kW
800V / 50A , < 0.5mJ/1kW
DC
EnerPulse 5
5 kW
800V / 12.5A (20~150kHz)
Pulse
EnerPulse 10LF
10 kW
800V / 25A (20~30kHz)
Pulse
EnerPulse 10LV
10 kW
650V / 33.3A (20~150kHz)
Pulse
EnerPulse 10
10 kW
800V / 25A (20~150kHz)
Pulse
EnerPulse 10MV
10 kW
1000V / 20A (10~50kHz)
Pulse
EnerPulse 10HV
10 kW
1400V / 20A (20~100kHz)
Pulse
PulseGen 20
20 kW
800V / 50A (20~100kHz)
Pulse
PulseGen 40
40 kW
800V / 100A (20~100kHz)
Pulse
DualPulse 10
10 kW
800V / 25A (20~100kHz)
Pulse
DualPulse 20
20 kW
800V / 50A (20~100kHz)
Pulse