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Vacuum Pump - Diffusion Pump – AX-65 / HS-2 / VHS-4 / VHS-6
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Pump Model
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AX-65
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HS-2
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VHS-4
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VHS-6
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Previous Model Number
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-
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0160
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0183
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184
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Speed, l/s (operating range)
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Air
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65
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160
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750
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1,550
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Helium & Hydrogen
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90
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200
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940
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1,930
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Maximum forepressure, Torr (mbar)
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No load
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0.75 (1.00)
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0.55 (0.72)
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0.65 (.86)
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0.65 (0.85)
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Full load
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0.60 (0.78)
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0.40 (0.52)
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0.55 (.73)
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0.55 (0.72)
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Maximum throughput,
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T-l/s (mbar-l/s) In operating range
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0.19 (0.25)
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0.60 (0.80)
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1.5 (2.0)
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2.4 (3.2)
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@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
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0.30 (0.40)
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0.70 (0.93)
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2.5 (3.2)
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3.5 (4.5)
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Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
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0.15 (0.25)
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5.0 (8.5)
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10 (17)
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17.0 (28.9)
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Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
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2 x 10-4
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1 x 10-3
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5 x 10-4
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5 x 10-4
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Warmup time, minutes
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7
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15
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10
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10
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Cooldown time, minutes
With quick cool coil, where applicable
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-
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10
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10
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10
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Fluid charge
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30cc
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100 cc
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300 cc
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500 cc
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Electrical requirements
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1 ph
50/60 Hz
90/115/165/220 V
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1 ph
50/60 Hz
120/240 V
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1 ph
50/60 Hz
120/208/240 V
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1 ph
50/60 Hz
120/208/240 V
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Power, Watts
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200/250
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450
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1450
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2200
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Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
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N/A
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0.1 (20)
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0.15 (30)
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0.25 (50)
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