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| Vacuum Pump - Diffusion Pump – HS-20 / HS-32 / HS-35 |
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Pump Model
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HS-20
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HS-32
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NHS-35
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Previous Model Number
|
0165
|
0167
|
0169
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Speed, l/s (operating range), Air
|
10,000
|
17,300
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28,000
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Helium & Hydrogen
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12,500
|
21,625
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35,000
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Maximum forepressure, Torr (mbar)
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|
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No load
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0.65 (.85)
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0.50 (.65)
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0.55 (.71)
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Full load
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0.55 (.72)
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0.35 (.45)
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0.40 (.52)
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Maximum throughput,
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T-l/s (mbar-l/s) In operating range
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12.5 (16.7)
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30 (40)
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25 (33)
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@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
|
18 (23.4)
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35 (45.5)
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35 (45.5)
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Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
|
100 (170)
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300 (510)
|
300 (510)
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Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
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1.5 x 10-3
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7 x 10-4
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5 x 10-4
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Warmup time, minutes
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60
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60
|
-
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Cooldown time, minutes
With quick cool coil, where applicable
|
85
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180
|
180
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Fluid charge
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3 U.S. gal.
(4.7 liters)
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3 U.S. gal.
(11.3 liters)
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3 U.S. gal.
(11.3 liters)
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Electrical requirements
|
3 ph, 50/60 Hz
240/415/480 V
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3 ph, 50/60 Hz
240/415/480 V
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3 ph, 50/60 Hz
240/415/480 V
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Power, Watts
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12000
|
24000
|
24000
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Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
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1.5 (300)
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4.0 (800)
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4.0 (800)
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