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Vacuum Pump - Turbo Pump
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Turbo-V
81 M
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Turbo-V
81 T
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Turbo-V 301
Navigator
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Turbo-V 551
Navigator
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Turbo-V 701
Navigator
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Turbo-V 1001
Navigator
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Pump Model
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Turbo-V
81 M
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Turbo-V
81 T
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Turbo-V 301
Navigator
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Turbo-V 551
Navigator
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Turbo-V 701
Navigator
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Turbo-V 1001
Navigator
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Pump Specification
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DN 40
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DN 63
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DN 100
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DN 160
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DN 200
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DN 250
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Pumping Speed, l/s
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Nitrogen
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50
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77
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250
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550
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690
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1050
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Helium
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56
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65
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220
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600
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620
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900
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Hydrogen
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46
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50
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200
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510
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510
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920
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Compression Ratio
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Nitrogen
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5 x 108
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7 x 108
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7 x 108
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> 1 x 109
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1 x 109
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1 x 109
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Helium
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8 x 104
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3 x 103
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1 x 105
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1 x 107
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1 x 107
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1 x 107
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Hydrogen
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7 x 103
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3 x 102
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1 x 104
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1 x 106
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1 x 106
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1 x 106
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Base pressure, mbar
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with recommended
mechanical pump
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5 x 10-10
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5 x 10-9
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< 5 x 10-10
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< 1 x 10-10
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< 1 x 10-10
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< 1 x 10-10
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with recommended
dry pump
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5 x 10-9
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5 x 10-8
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< 5 x 10-9
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< 1 x 10-10
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< 1 x 10-10
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< 1 x 10-10
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Startup Time, min
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< 1
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< 1
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2.5
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< 5
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< 5
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< 4
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Rotational Speed,
rpm
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80,000
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80,000
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56,000
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42,000
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42,000
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38,000
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Recommended Forepump
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Two-stage
mechanical pump
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DS 42 -
DS 102
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DS 42 -
DS 102
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DS 102
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DS 302
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DS 402
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DS 402
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Dry pump
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SH-110
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SH-110
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SH-110
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TS300
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TS300
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TS300
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Inlet Flange, nominal diameter
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Klamp Flange, mm
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40
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-
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-
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-
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-
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-
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ConFlat®, mm
(inches OD)
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35 (2.75)
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63 (4.5)
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100 (6)
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160 (8)
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200 (10)
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-
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ISO clamp style, mm
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-
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63
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100
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160
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200
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250
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ISO-F bolted, mm
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-
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-
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-
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160-F bolted
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200-F bolted
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250-F bolted
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Foreline Flange, nominal diameter
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Klamp Flange
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NW16
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NW16
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NW16
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NW25
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NW25
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NW40
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SEM Version
Available on Request
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-
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-
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•
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•
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•
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•
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Controllers
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Rack Controller
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•
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•
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•
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•
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•
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•
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Navigator on board
Controller
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•
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•
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•
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•
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•
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•
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Integrated lectronics
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-
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-
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-
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-
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-
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-
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PCB Controller
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•
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•
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•
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-
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-
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-
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