Turbo Pumping System

Vacuum Pump - Turbo Pumping System

TPS-mobile	Features ■ Completely dry, high capacity pumping systems ■ Higher compression ratio and pumping speed ■ Roll around Cart or Bench solutions ■ Two voltages 110 / 230 V ■ Versatile and Reliable ■ Fast Start Up ■ Turbomolecular Pumps from 46 to 600 l/sec ■ T-Plus Navigator Software allows communication with your PC ■ Dry Scroll or Rotary Vane Primary Pumps ■ Gauges and Accessories available ■ Custom solutions available Benefits ■ Fast, clean, dry pump down from atmosphere to 10 E^–10 mbar ■ Pressure monitor ■ Portable and compact ■ No maintenance required ■ Low cost of ownership Applications ■ UHV System pump down ■ Ion pump roughing ■ Lamp and tube processing ■ Cryopump regeneration ■ High Vacuum Systems operation ■ High and Ultra High Vacuum systems bake out

TPS-bench

TPS-compact

Features ■ New Generation Turbomolecular Pump Turbo-V 81-M and TV301 Navigator ■ Compact, Light, Dry, Clean and Robust System ■ Voltage 110-220 V - CE/CSA certified ■ RS-232 or Analogical Communication ■ Large pressure data display on board ■ Pressure driven set point, Analog set point ■ IDP-3 Dry Scroll backing pump ■ This product can be offered with wheels		Benefits ■ Designed for demanding applications ■ Cost-effective pumping solution ■ Can be used world-wide ■ Easy to use: plug and play system ■ Complies with world-wide safety standards ■ Easy system pressure measurement ■ Easy Tip-seal replacement ■ Excellent base pressure up to 10^-9 mbar ■ Easy to be moved in small space
Applications

Electron Microscopy and Mass Spectrometry	Industrial Applications	Semiconductor Manufacturing	High Energy Physics Research & Labs