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Vacuum Valve – Gate Valve / Laminar Flow Valve / 3-Position Gate Valve
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11000 Series Standard Cycle Gate Valve
The 11000 Series Gate Valves feature a positive lock-over center mechanism or soft closure with pneumatic lock (optional). Valves maintain a closed status in the event of an air pressure loss. These valves provide valving for cryopumps, turbomolecular pumps, ion pumps and other applications requiring clean, low outgassing valves.
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mm
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16
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40
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50
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63
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75
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100
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150
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200
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250
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273
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300
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350
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400
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500
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600
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inch
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0.625
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1.5
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2.0
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2.5
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3.0
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4.0
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6.0
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8.0
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10.0
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10.75
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12.0
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14.0
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16.0
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20.0
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24.0
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13000 Series Laminar Flow Valve
The Laminar Flow 13000 Series Gate Valves feature a laminar flow port orifice that effectively seals the valve mechanism from the gas stream. Two discrete carriage positions provide either 100% conductance (fully open) or 0% conductance (fully closed). In the open position, a flow orifice isolates all internal parts from the flow path. This orifice provides a clean, unbroken flow path through the valve while eliminating contact of the process gas with any of the valve mechanisms. Laminar Flow valves may be used in etching, CVD and any other process that uses highly corrosive gases which may be damaging to other valves.
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mm
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40
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50
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63
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75
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100
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150
|
200
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250
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273
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300
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inch
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1.5
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2.0
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2.5
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3.0
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4.0
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6.0
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8.0
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10.0
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10.75
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12.0
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21200 Series Million Cycle Gate Valve
31200 Series Million Cycle Long Life Gate Valve
The 21200 / 31200 Series Gate Valves feature a positive shut off; the valve will maintain its closed status in the event of a power loss followed by a pressure drop. These valves can be used with cryopumps, turbomolecular pumps, ion pumps, or in any application requiring clean, high cycle, low maintenance and low outgassing valves with positive shut-off characteristics.
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mm
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16
|
40
|
50
|
63
|
75
|
100
|
150
|
200
|
250
|
273
|
300
|
350
|
400
|
500
|
600
|
|
inch
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0.625
|
1.5
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2.0
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2.5
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3.0
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4.0
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6.0
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8.0
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10.0
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10.75
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12.0
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14.0
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16.0
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20.0
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24.0
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21700 Series 3 Position Gate Valve
The 21700 Series Pneumatic 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. Valve positions are fully open, fully closed and any set third position. These valves may also be utilized to smooth the transition from rough to high vacuum.
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mm
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100
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150
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200
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250
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300
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inch
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4.0
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6.0
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8.0
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10.0
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12.0
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