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Vacuum Valve – Throttle Valve / Isolation Valve / Pendulum Gate Valve
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16000 Series Shielded Gate Valve
The 16000 Series Shielded Gate Valves feature a traveling shield that moves with the gate to protect it from debris. These valves are used in extremely aggressive applications in which recurring down time is not an option. The shield, used with or without the purge port, greatly reduces particulate migration and prolongs the sealing integrity of the gate O-ring.
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mm
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40
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75
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100
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150
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200
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250
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300
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350
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inch
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1.5
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3.0
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4.0
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6.0
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8.0
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10.0
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12.0
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14.0
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21800 Series Closed Loop Throttle Valve
The 21800 Series Closed-Loop Pneumatic Throttle Gate Valves utilize a standard HVA 21200 Series valve design with the addition of a patented throttle actuating mechanism. The throttle actuating mechanism consists of an MKS 146C Vacuum Gauge Measurement and Control System, an OMRON Analog Fiber-Optic Sensor and Amplifier, a PNEUTRONICS Pressure Control Unit and an over-sized HVA patented differential pressure actuator assembly. Shock and vibration are reduced to a minimum by our unique air cylinder design.
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mm
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100
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150
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200
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250
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300
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inch
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4.0
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6.0
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8.0
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10.0
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12.0
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47200 Series Throttle / Isolation Valve
The 47200 Series Throttle / Isolation Gate Valve is a unique concept incorporating throttling and isolation in the same valve. Constructed of 304 stainless steel with vacuum compatible aluminum vanes, the valve has two welded bellows to seal both actuators for gate isolation and throttling vanes. With a low profile actuator, this valve lends itself to installation in limited space locations.
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mm
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100
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150
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200
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250
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300
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350
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inch
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4.0
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6.0
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8.0
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10.0
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12.0
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14.0
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30000 Series Pendulum Gate Valve
30000 Series Bi-metal Pendulum Valves were developed for applications that require mating metal sealing flanges and for certain corrosive environments. The stainless steel body portion allows the installation of most standard flanges in the vacuum industry. The valves may be used as a basic high vacuum isolation valve or a load-lock transfer port.
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Bi-metal Valves
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CF-F Flange、ISO Bolt Flange、ISO Clamp Flange、
ANSI Flange、JIS Flange、Straight Actuator
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Aluminum Valves
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ISO Bolt ＆ JIS Flange、Straight Actuator
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